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A fully-integrated CMOS-MEMS audio microphone | IEEE ...
https://ieeexplore.ieee.org/abstract/document/1215295/
A fully-integrated CMOS-MEMS audio microphone Abstract: We report on the construction of a microphone and associated electronics fabricated entirely within a standard CMOS (complementary metal oxide semiconductor) die.
[PDF] A fully-integrated CMOS-MEMS audio microphone ...
https://www.semanticscholar.org/paper/A-fully-integrated-CMOS-MEMS-audio-microphone-Neumann-Gabriel/ca3dfa8cbc782410dc64c19ec10bb6ae7ebdf395
No.03TH8664) We report on the construction of a microphone and associated electronics fabricated entirely within a standard CMOS (complementary metal oxide semiconductor) die. An A-weighted noise level of 46 dB SPL was achieved with a total diaphragm area of 0.61 mm/sup 2/. Because the microphone uses the same processing sequence as …
A fully-integrated CMOS-MEMS audio microphone
https://www.researchgate.net/publication/4024594_A_fully-integrated_CMOS-MEMS_audio_microphone
With developments in MEMS microphones in CMOS technology [5], a fully monolithic digital microphone may soon become possible. With such a digital microphone only …
MEMS microphone fully-integrated CMOS cap-less ...
https://ieeexplore.ieee.org/document/7974101
MEMS microphone fully-integrated CMOS cap-less preamplifiers Abstract: A pair of completely integrated capless preamplifiers (not requiring external capacitance) for MEMS microphones are presented. The devices exploit specific circuit solutions to implement a proper dc biasing of the pre-amplifier and a low frequency ( ; 1 Hz) high-pass pole.
MEMS microphone fully-integrated CMOS cap-less ...
https://www.semanticscholar.org/paper/MEMS-microphone-fully-integrated-CMOS-cap-less-Croce-Berti/3cff6e7b5e550701587d3987ba9d3ad627cf92d3
MEMS microphone fully-integrated CMOS cap-less preamplifiers. A pair of completely integrated capless preamplifiers (not requiring external capacitance) for MEMS microphones are presented. [...] Both solutions have variable gain configurations [−6, 0, …
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