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CMOS-MEMS membrane for audio-frequency acoustic actuation ...
https://www.sciencedirect.com/science/article/pii/S0924424701007282#:~:text=Using%20CMOS-MEMS%20micromachining%20techniques%20we%20have%20constructed%20a,steps%20developed%20at%20Carnegie%20Mellon%20University%20%5BSens.%20Actuat.
CMOS-MEMS MEMBRANE FOR AUDIO-FREQUENCY …
https://research.ece.cmu.edu/~mems/pubs/pdfs/ieee/mems/0021_neumann-2001.pdf
Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU [1]. The ability to build a membrane directly on a standard CMOS chip, integrating mechanical structures with
CMOS-MEMS membrane for audio-frequency acoustic …
https://www.sciencedirect.com/science/article/pii/S0924424701007282
Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that generates audible acoustic output from 40 Hz to 10 kHz. The fabrication of the acoustic membrane consists of only two additional steps subsequent to the prior post-CMOS micromachining steps developed at Carnegie Mellon University [Sens. Actuat.
CMOS-MEMS membrane for audio-frequency acoustic …
https://www.researchgate.net/publication/3889935_CMOS-MEMS_membrane_for_audio-frequency_acoustic_actuation
CMOS-MEMS membrane for audio-frequency acoustic actuation February 2001 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 95(2):236 - 239
CMOS-MEMS membrane for audio-frequency acoustic …
https://www.semanticscholar.org/paper/CMOS-MEMS-membrane-for-audio-frequency-acoustic-Neumann-Gabriel/2d3e34f649f2ed617beedd65033f6d8f16364faa
The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU. The ability to build a membrane directly on a standard CMOS chip, integrating mechanical structures with signal processing electronics will enable a variety of applications including economical earphones, microphones, hearing aids, …
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